A low-cost high-performance cleanroom enclosure
نویسندگان
چکیده
منابع مشابه
A Low-Cost High-Performance Cleanroom Enclosure - Education, IEEE Transactions on
A conventional laboratory room was converted into a cleanroom for laser microfabrication. These simple techniques resulted in a measured class 100 environment at the surface of the optical table, well beyond the class 1000 design goal. The total conversion costs were approximately 40% the cost of a comparable commercial modular cleanroom, sufficiently inexpensive for the devlopment of microfabr...
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ژورنال
عنوان ژورنال: IEEE Transactions on Education
سال: 1999
ISSN: 0018-9359
DOI: 10.1109/13.762951